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US8036864B2

Method for predicting the formation of silicon nanocrystals in embedded oxide …

University of Texas System

Abstract

A method for predicting the formation of silicon nanocrystals in an oxide matrix is disclosed. Initially, fundamental data for a set of microscopic processes that can occur during one or more material processing operations are obtained. Kinetic models are then built by utilizing the fundamental …

University
University of Texas System
Assignee
The Board Of Regents, The University Of Texas System
Inventor
Gyeong S. Hwang
Priority date
September 29, 2005
Filing date
September 29, 2006
Grant date
October 11, 2011
Publication date
October 11, 2011
Language
en
Metadata fetched
August 29, 2026 00:20