US8926888B2

Fluorinated silazane release agents in nanoimprint lithography

University of Texas System

Abstract

An imprint lithography release agent having general formula (1): where R 1 represents H or CH 3 , n is an integer from 1 to 5, and m is an integer from 1 to 40. Fluorinated silazanes of general formula (1) can be used to form a release layer on an imprint lithography template, added to an imprint …

University: University of Texas System
Assignee: Board Of Regents, The University Of Texas System
Inventor: Carlton Grant Willson
Priority date: February 25, 2011
Filing date: February 24, 2012
Grant date: January 06, 2015
Publication date: January 06, 2015
Language: en
PDF source: https://patentimages.storage.googleapis.com/94/c7/23/6854b0a38eb8d3/US8926888.pdf
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