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US9040121B2

Using chemical vapor deposited films to control domain orientation in block …

University of Texas System

Abstract

Vacuum deposited thin films of material are described to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block …

University
University of Texas System
Assignee
Board Of Regents The University Of Texas System
Inventor
C. Grant Willson
Priority date
February 10, 2012
Filing date
February 07, 2013
Grant date
May 26, 2015
Publication date
May 26, 2015
Language
en
Metadata fetched
August 29, 2026 00:22