US9366601B1

Wafer fabrication monitoring/control system and method

University of North Texas

Abstract

A wafer fabrication monitoring/control system and method is disclosed. The invention utilizes Multiple Internal Reflection Infrared Detection (MIR-IR) to provide a highly sensitive (sub-10 nm, in-situ, ex-situ) on-wafer monitoring and characterization apparatus and method. The disclosed system and …

University: University of North Texas
Assignee: University Of North Texas
Inventor: Jin-Jian Chen
Priority date: March 15, 2011
Filing date: March 15, 2012
Grant date: June 14, 2016
Publication date: June 14, 2016
Language: en
PDF source: https://patentimages.storage.googleapis.com/7f/31/3e/d9d97040fb88f0/US9366601.pdf
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