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US9704951B2

Apparatus and method for magnetic-field guided metal-assisted chemical etching

University of Texas System

Abstract

A magnetic field-guided method of metal-assisted chemical etching comprises immersing a structure that comprises a two-dimensional magnetic pattern layer on a surface thereof in an etchant solution. The magnetic pattern layer sinks into the structure as portions of the structure directly under the …

University
University of Texas System
Assignee
Board Of Regents, The University Of Texas System
Inventor
Xiuling Li
Priority date
November 15, 2013
Filing date
November 14, 2014
Grant date
July 11, 2017
Publication date
July 11, 2017
Language
en
Metadata fetched
August 29, 2026 00:24